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Статьи в журналах
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- 2007 Remarkably efficient acid generation in chemically amplified resist from quantum chemistry modeling
- Granovsky Alex A., Bochenkova Anastasia V., Suetin Nikolay, Fryer David, Singh Vivek
- в журнале Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, издательство AIP Publishing (United States), том 25, № 1, с. 58-68 DOI