X-ray Diagnostics of Multilayer Ti/Ni Mirrors with Different Configurations of Si Buffer Layer Using X-ray Reflectometry and X-ray Standing Wave Methodsстатья
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Дата последнего поиска статьи во внешних источниках: 4 марта 2026 г.
Аннотация:The results of studying the multilayer mirrors (periodic Ti/Ni structures with different configurations of Si buffer layer), which are promising in developing mirror optics for synchrotron radiation, are presented. Samples with period structures Ti/Ni, Ti/Si/Ni, Ti/Ni/Si, and Ti/Si/Ni/Si were investigated byX-ray reflectometry and X-ray standing wave (XSW) methods. It is found that the Ti/Ni system is characterized by the largest thicknesses of transition layers at the Ti/Ni interfaces. Addition of Si interlayers betweenTi and Ni layers leads to a decrease in the transition layer thicknesses, while addition of Si only within a periodor only between periods leads to asymmetry of electron density profiles and elemental distribution profilesover the structure depth. It is shown that the structure with a Si buffer layer both between layers withina period and between the periods themselves (Ti/Si/Ni/Si) is an optimal mirror configuration in terms ofreflectometry intensity.