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Investigation of contact area in a MEMS switch performed with AFMстатья Исследовательская статья
Статья опубликована в высокорейтинговом журнале
Информация о цитировании статьи получена из
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 4 марта 2026 г.
- Авторы: Uvarov I.V., Naumov V.V., Muravyeva T.I., Shcherbakova O.O., Svetovoy V.B.
- Журнал: Sensors and Actuators, A: Physical
- Том: 397
- Год издания: 2026
- Издательство: Elsevier BV
- Местоположение издательства: Netherlands
- Первая страница: 117295
- DOI: 10.1016/j.sna.2025.117295
- Аннотация: Micromechanical switches have a significant interest in communication systems due to superior radio frequency (RF) performance in combination with compact size, high switching speed and low power consumption. The main problem with MEMS switches is low reliability, which is defined largely by mechanical contact and the state of used materials. In this paper, a very small microswitch with a cantilever of 50 µm long and a contact bump of 3 µm wide is considered. The contacting surfaces made of sputtered ruthenium are analysed qualitatively with a scanning electron microscope and quantitatively with an atomic force microscope (AFM). The latter gives the most detailed information on the contacting surfaces. The analysis of 16 pairs of AFM images (contact bump/contact pad) allows the determination of contact area for a given load force and yield strength of the material. The inverse proportionality between the contact area and yield strength is realized with good precision. One can increase the contact area by increasing the grain size on the contact pad. It is demonstrated that the adhesion forces related to intermolecular interaction can be neglected, but capillary forces can be important in conditions of high humidity.
- Добавил в систему: Муравьева Тамара Ивановна
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