Electron beam with homogeneous solids interaction simulation using Monte-Carlo method in discrete looses approximationстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
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Авторы:
Borisov S.S.,
Grachev E.A.,
Zaitsev S.I.
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Сборник:
Proceedings of SPIE - The International Society for Optical Engineering
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Год издания:
2004
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Первая страница:
144
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Последняя страница:
151
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DOI:
10.1117/12.552147
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Аннотация:
From Conference Volume 5398
Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev
March 01, 2004
Abstract
Problems of backscattered and true-secondary spectra as far as transmission spectra simulation using discrete looses approximation are regarded in this article. Developed model allows acquiring the electron energy spectra from samples with complicated 3-d structure. Besides due to higher detailing of the discrete looses method one can evaluate the spatial energy and accumulated charge distributions more accurately. Simulation results are compared with the experimental ones, SEM image simulation examples are given.
© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Topics
Electron beams ; Electrons ; Simulations ; Solids
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Добавил в систему:
Грачев Евгений Александрович