Simulation of the fluctuations of energy and charge deposited during e-beam exposureстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:The stochastic nature of an energy and charge deposition process is examined using a model based on discrete loss approximation (DLA). Deposited energy deviations computed using the continuous slowing down approximation (CSDA) and DLA are compared. It is shown that CSDA underestimates fluctuations in deposited energy.
The text was submitted by the authors in English.