low-pressure single aerosol source MOCVD of YBCO thin filmsстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:YBCO thin films are obtained by low-pressure aerosol version of MOCVD technique. The effects of different process factors are studied. The conclusion is made that the main disadvantage of the process is the high partial pressure of carbon dioxide in the deposition zone. The ways to improve the ituation are considered