Nanometrology: Simulation of scattering processes of optical radiation by nanodimensional structuresстатья
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Дата последнего поиска статьи во внешних источниках: 18 июля 2013 г.
Аннотация:Mathematical simulation of the process of scattering of an optical wave by micro-or nano-scale structure on the basis of the vector equations of the electromagnetic field is performed. A rigorous analytic solution is obtained and the scattering problem solved by means of the method of finite elements.