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On the effect of the crystal structure in the sputtering of two-component single-crystal structuresстатья
Информация о цитировании статьи получена из
Web of Science,
Scopus
Статья опубликована в журнале из списка Web of Science и/или Scopus
Дата последнего поиска статьи во внешних источниках: 12 января 2022 г.
- Авторы: Samoilov V.N., Ananieva N.G.
- Журнал: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
- Том: 13
- Номер: 4
- Год издания: 2019
- Издательство: Pleiades Publishing, Ltd
- Местоположение издательства: Road Town, United Kingdom
- Первая страница: 780
- Последняя страница: 785
- DOI: 10.1134/S1027451019040323
- Аннотация: 6 pages, 4 figures, 1 table. The transmission sputtering of component atoms under ion bombardment of the (0001) face of a two-component VSi2 single crystal is studied using molecular-dynamics computer simulation. The sputtering of component atoms is calculated in the case of the sputtering of virtual VV'2 and Si'Si2 single crystals consisting of atoms with the same masses, and the following new effect in the selective sputtering is studied: atoms from vanadium sites are preferentially transmission sputtered in the case of the same masses and binding energies of component atoms. This effect can be called the effect of nonidentity of the component sites in the complex VSi2 lattice (of the C40 type) with respect to the momentum propagation in collision cascades, i.e., the effect of structure in the selective sputtering of two-component single crystal targets. Keywords: sputtering, ion transmission, selective sputtering, transmission sputtering, two-component targets, VSi2, thin single crystal films.
- Добавил в систему: Самойлов Владимир Николаевич
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