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In this work we demonstrated experimentally the possibility of the fabrication of a highly sensitive pH sensor and charge sensor based on NW FET made from SOI using traditional semiconductor technology. Besides that it has been shown the possibility of application of the nanowire in the field of medical chemistry for the determination of PSA — prostate cancer marker. We found that the density of active sites of immobilized antibodies on silicon surface can be increased in case of immobilization of not native antibodies but their fragments. The good correlation of the immune complexes density between model silicon system and the nanowire itself was achieved. Th e developed system we suggest to use for the future investigations with direct immobilization of the antibodies on the NanoWire FET.