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The femtosecond laser writing is a flexible method enabling fast fabrication of integrated optical circuits. It is widely used for different tasks including boson sampling and quantum walks in continuously coupled waveguide lattice. Among the important requirements for waveguide lattices are low loss and high homogeneity of waveguides both in writing depth and sample length. We developed the femtosecond laser writing regime of waveguides with low loss and high uniform in wide range of depths. It enables to fabricate waveguide lattices for topological photonics, boson sampling, quantum walks.