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One of the most promising device for various diseases diagnosing is biosensor based on field-effect transistors with a nanowire (NW) channel. The advantage of such device is their high sensitivity due to the high ratio of the NW surface area to its volume. Sensors based on field-effect transistors do not need the additional labels for registration, allow quick and real-time measurements. Also the state of the art allows easily integrate such sensors in complex diagnostic devices. Some applications require a specific temperature regime to achieve optimal biosensor performance. In the case of a DNA sensor, raising up the operating temperature of the system to the value at which DNA hybridization starts, will increase the specificity and avoid false positive results, as well as shorten the analysis time dramatically. An accurate temperature control technique which allow set up sensor at 85-90 °С will allow the complete removal of the analyte from its surface and use it many times.