Extended Abstracts of the 2018 International Conference on Solid State Devices and Materialsсборник

Статьи, опубликованные в сборнике

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• • 2018 Gas Phase Pore Stuffing for Damage Mitigation during Plasma Etching
  • Yamaguchi T., Nozawa S., Fujikawa M., Marneffe J.F de, Chanson R., Gavan K.B., Rezvanov A., Lazzarino Fr
  • в сборнике Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials, издательство Japan Soc of Applied Physics (Japan), тезисы DOI